
Applications
Semiconductor, Research Labs
Features
- Point-of-Use
- Free Poppet / Tied Diaphragm Type
- 10 Ra or 5 Ra Microinch Internal Surface
- Metal to metal body to diaphragm seal
- Low particle entrapment
Specifications
- Maximum Inlet Pressure : 600 psig (41bars) and 3500psig (241barg)
- Outlet Pressure Range : 1-30psig (1-2.1barg), 1-60psig (1-4.2barg), 1-100psig (1-7.0barg), 1-150psig (1-10.5bargs), 1-250psig (1-17.5barg)
- Operating Temperature Range : -40℉ (-40℃) to 350℉ (177℃)